Vacuum and Gases真空和气体.ppt

X-ray Analysis X-Ray Tools Energy Dispersive X-ray Spectroscopy (EDS) Wavelength Dispersive X-ray Spectroscopy (WDS) X-ray photoelectron spectroscopy (XPS) X-ray diffraction (XRD) X-ray fluorescence (XRF) Energy Dispersive X-Ray Spectroscopy, EDS Element maps Spectra Applications System overview System image X-Ray detector EDS Element Map EDS Applications Used to determine the elemental composition of a sample. Can perform both qualitative (What is it?) and quantitative (How much?) analysis. Depending on the window low atomic number elements may not be visible. Super ultra thin windows detect down to berilium. Older detectors may only detect fluorine and higher. Window less detectors are available. EDS Image Energy Dispersive X-Ray Detector System Solid state Si Li X-Ray Detector Energy Dispersive X-Ray Detector System Energy Dispersive X-Ray Detector System Vendors EDAX /index.html Princeton Gamma Tech / Noran/Kevex/Thermo /BURedirect/welcomeMsg/1,5107,28,00.html Oxford Instruments / Energy Dispersive X-Ray Spectroscopy, EDS Element maps Spectra Applications System overview System image X-Ray detector Vendors Wavelength Dispersive X-Ray Spectroscopy, WDS System Overview Detector Image WDS Detector WDS Detector Wavelength Dispersive X-Ray Spectroscopy System Overview Detector Image X-Ray Photoelectron Spectroscopy,XPS Example of XPS X-ray Photoelectron Process X-Ray Photoelectron Spectroscopy An incoming X-Ray removes a core electron which will have a characteristic energy based on the difference between the initial X-Ray energy, which is of known energy, and the energy to remove the inner electron from the atom, which is characteristic. This has very high sensitivity 100 ppm Area is somewhat large at 10-200 microns X-ray FluorescenceXRF X-rays are directed at a sample and X-rays given off from the sample are analyzed with either EDS or WDS. Atmospheric systems are available which are useful for detecting lead in products. Links /hbase/quant