激光调阻系统及修调技术.docxVIP

摘要 片式电阻因其体积小、精度高、可靠性好等优点被广泛应用于许多领域，有替代传统电阻的趋势。片式电阻是通过丝网将电阻材料印刷到电阻基片上的，其阻值通常具有不大于 40%的制造误差，一般采用激光调阻法对其阻值进行修调。调阻精度是衡量激光调阻性能的重要技术指标，由于我国在激光调阻方面的研究起步较晚，与国外设备相比，国产激光调阻机的调阻精度有待进一步提高。论文分析了影响激光调阻精度的因素，确定应用优化调阻控制策略的方法。 实际数据表明，混合集成电路中采用的同一台激光调阻设备按照同一种精度要求微调电阻阻值时，实际调阻精度与被调电阻的阻值具有一定的相关性。提高调阻精度，而优化调阻控制策略的前提是准确掌握激光调阻的阻值对调阻精度的影响，因此论文的研究内容为毕业设计的任务是基于数理统计原理，结合数值模拟方法，确定相关关系的定量表达式，并结合实测数据进行分析验证。 关键词： 激光调阻 调阻精度 线性拟合 ABSTRACT For small volume， high precision and well reliability， the chip resistors have been used in many fields. And there is a trend that the chip resistor will fill in the traditional resistor. Resistor material is printed on chip resistors using silkscreen. So they have the manufacture error that is less than 40%. Generally， using laser trimming to adjusts the resistance of chip resistors accurately. Trimming precision is an important technique item for laser trimming. The study of trimming precision isn’t well done in our country. Compare to other country， the trimming precision of Laser Trimming System made in our country need to be improved .Firstly， the thesis analyzes the items that affect the trimming precision. And determines to improve the trimming precision by optimizing control strategy of laser trimming. The actual data?show that the?hybrid integrated circuit?using?the?same?laser?trimmingequipment?to?fine-tune?the?requirements?in?accordance?with?the same?precision?resistor, the actual?transfer?resistance?precision?resistor?was transferred?to?the?correlation. Improve?the?accuracy?of?trimming, while?optimizing?the premise?of?the?trimming?control strategy?is the?accurate knowledge of?the resistance?of?the?laser trimming?reversed resistance?accuracy of?the?thesis?for?the?graduate design?tasks?based?on?mathematical statistical theory?and numerical simulation?methods?to determine the?the?correlation between?quantitative?expression,combined with?the measured data?for analysis validation. Key Words：Laser trimming Trimming?precision Linear fit