基片表面力负载对saw谐振器特性影响研究-study on the influence of substrate surface force load on saw resonator characteristics.docxVIP

ABSTRACTSurface acoustic wave (SAW) propagates on piezoelectric substrate surface，when the surrounding physical parameters (such as temperature, pressure, magnetic field, electric field, gas, etc.) change the physical characteristics of piezoelectric substrate and consequently the SAW propagation characteristics (such as velocity and loss) will be changed. In order to study the characteristics of SAW resonator under force loaded on the substrate surface, the theoretical analysis and experimental studies areconducted.This paper mainly includes the following aspects:① This paper first