集成光波导微环谐振腔的电光调制特性分析-analysis of electro-optic modulation characteristics of integrated optical waveguide micro-ring resonator.docx

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集成光波导微环谐振腔的电光调制特性分析-analysis of electro-optic modulation characteristics of integrated optical waveguide micro-ring resonator.docx

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集成光波导微环谐振腔的电光调制特性分析-analysis of electro-optic modulation characteristics of integrated optical waveguide micro-ring resonator

MEMS工艺，如：ICP刻蚀、电子束光刻、离子注入等工艺制备出基于SOI波导谐振腔的电光调制器件芯片。对自由波谱范围为2.6nm的微环谐振电光调制器件施加外部驱动电压信号对其进行调制特性静态和瞬态特性测试，结果为：静态特性测试产生谐振频移并随驱动电压信号增大而频移宽度变大，驱动峰值电压达到一定数值后，P-N结被击穿；瞬态特性测试其调制深度为0.899，消光比为10.14dB，最大调制频率达30MHz。关键词：集成光学，SoC，SOI，微环谐振腔，电光调制器ResearchofElectro-opticalModulationCharacteristicsofIntegr-atedOpticalWaveguideMicro-ringResonatorAbstractWiththerapiddevelopmentofintegratedoptics,modernSoC(SystemonChip)technologybasedonSOIdeviceshasbecomethemainstreamoffutureopticalcommunicationandintegration.BecauseoftheuniqueadvantageofSoCdevicesonopticalprocess,opticalcalculation,opticaltransmissionandopticalcontrol,ithasbecometheresearchhottopicinrecentacademicworldbothhomeandabroad.However,themainbottleneckrestrictingthedevelopmentofSoCistheintegrationproblem.Andsincehigh-qualitySOImaterialshavehighdifferenceofrefractiveindex,transparenttransmissionofcommunicationchannelandfullycompatibilitywithCMOSfabricationprocess,itcanreducethechipsizesandincreasechipintegrationdensityingreatdegreetorealizetheconnectionandintegrationforphotoelectronics.SoSOImaterialbecomesthefirstchoiceforthefabricationofdiscretedevicesinSoCintegration.SOImicro-ringresonator,asthemainpartofintegratedoptics,canbeappliedtofiltering,opticalswitch,modulator,detector,etc.Asfurtherexplanationofsiliconphotoelectriceffectduetosemiconductorphysicstheoryandquantummechanics,theresearchonSOImicro-ringresonantelectroopticalmodulatorbecomesthefocusanddifficultissuerecently.SOImicro-ringmodulatorbasedonsiliconphotoelectriceffectrealizesthemodulationandshiftinessofopticalsignalbythechangeofwaveguiderefractiveindex.Itbecomesthebestsolutioninmakinghigh-speedopticalmodulatorandopticalswitchbecauseitovercomesthelimitationofthermaldiffusionandradiationwhenthermo-opticeffectmodulatorisheated,breakthroughtheproblemoflowrespondspeedcomparedwithacuosto-opticdevicesandhavehighmodulationspeed.Therefore,researchonelectro-opticalmodulatorsbasedonSOImicro-ringwaveguideisthebasisoftherealizationofmodernSoCdevices.Inthispaper,weaimedatelectro-