超精密加工表面的白光扫描干涉测量系统分析-analysis of white light scanning interferometry system for ultra-precision machined surface.docxVIP

ABSTRACTThe continuous development in the field of modern national defense industry, aerospace, automobile manufacturing, the increasing requirement of ultra-precision machining parts, as well as the continuous miniaturization and refinement trend of machinery parts, electronic devices, and optical components has put forward higher requirements to the topography detection technology of ultra-precision machining surface. Through the analysis and comparison of the methods in surface topography measurement of ultra-precision machining parts, this paper adopted the high precision measurement metho