太阳能丝网印刷装备硅片步进与对准系统分析-analysis of silicon wafer stepping and alignment system for solar screen printing equipment.docxVIP

AbstractWithelectricpower,coalandoilandothernon-renewableenergygettingclosetheedgeofextinction,anewglobalenergyrevolutionisbeinglaunchedinmostofcountries.Asanewrenewableresourcesolarenergywillmakethemainlycontributioninworldenergysupply.Solarcells,asatypicalformofsolarenergyapplication,havebeenappliedinmanykindsofarea.Solarwaferscreenprintingequipmentisoneofthemostimportantdevicesinsolarcellsautomatedproductline.Thesiliconwaferstepsystemandthealignmentsystemoftheprintingequipmentarethekeypointsaffectingthesiliconwaferprintquality.Basedonthestudyofthesiliconwaferstepalignmentsystem,thethesismainlycompletedthemechanicaldesign,didprogramanalysisandoptimizationonbothtwosystemsandrealizedthehigh-speedfeedingandprecisionalignment.Themainresearchcanbeconcludedasfollows:Firstly,completedtheoverallprogramandmechanicaldesignofthewaferstepalignmentsystemaccordingtotheprocessrequirement,analyzedthedifferencesbetweensingledrivesolutionanddoubledrivesolutionandhadadiscussionontheserialparallelmechanismofthevisionalignmentsystem.Secondly,didprogramanalysisandoptimizationonthecamdrivemechanismaccordingtotheworkrequirementofstepsystem,comparedmotionperformancesbetweeneccentricwheelmechanismandoptimizedcammechanismthroughmotionsimulation,besidesdesignedaplanar3-dofparallelalignmentmechanism,proposedasetofcalculationforthealignmentbetweenwaferandscreenwhichcontributedtostabilityandperformanceimproving,basedonthealignmentprinciple.Atlast,didanalysisandpresentationofthecontrolsystemselectionandrealizedthespecialmovementsoftheagency.Thestepalignmentsystemthispaperstudiedcanachievethewholeprogressfromloading,alignmenttounloadingwhichisaimportantsupportforthescreen-printingequipmentproduction.Besidestheresearchrelatedinthestudycanalsobeappliedinotherequipmentinwhichalignmentarerequired.Keywords:Solarcells;Screenprinting;Visionalignment;Kinematicanalysis;Auto-calibration目录摘要.........................................................................................................IAbstract....