准分子激光器线宽压窄模块与环形腔分析-analysis of linewidth narrowing module and ring cavity of excimer laser.docxVIP

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准分子激光器线宽压窄模块与环形腔分析-analysis of linewidth narrowing module and ring cavity of excimer laser.docx

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准分子激光器线宽压窄模块与环形腔分析-analysis of linewidth narrowing module and ring cavity of excimer laser

华中科技大学硕士学位论文华中科技大学硕士学位论文 II II Abstract By the means of immersion lithography and double patterning, 193 nm ArF excimer laser source is still the mainstream source of lithography tools. The linewidth of the excimer lasers must be reduced and the pulse energy must be amplified to meet the strict requirements of lithography. Among the existing technologies, prism-grating combination and ring cavity are the common linewidth-narrowing module and regenerative amplifier respectively. First of all, theoretical analysis was carried on the three-prism grating system. The linewidth formula of the system was derived based on the dispersion equations of prisms and grating. Using ZEMAX software, the model for the three-prism grating combination was built in mixed sequential/non-sequential mode. Thermal stability, rotational sensitivity and transmission of the prisms were analyzed; it was found that the three-prism grating structure was better in comparison with two-prism grating structure. Theoretical and experimental studies of ring cavity of TEA CO2 laser were also made in this thesis. The factors which influenced the output energy, such as astigmatism, reflectivity of the coupling mirror, the shape of the coupling mirror were studied, the experimental results showed that changes of reflectivity was the major factor that affect the output energy. This work was helpful in the design of ring cavity for excimer laser. At last, experimental study of ring cavity of excimer laser were made. The rectangular ring cavity was finally adopted to make experiment, it was found that there were no oscillations in the free oscillating ring cavity; and laser oscillation was only observed with an extra mirror in the direction of the discharge cavity axis, in which multiple peaks were found in the temporal waveform of pulsed laser radiation, and the interval between the peaks were equal to the time it takes for light to make one pass across the cavity. These characteristics could be