版图转换算法与灵敏度新模型研究-电子与通信工程专业论文.docxVIP

万方数据 摘要 摘要 集成电路的成品率优化一直是半导体业界关心的问题，尤其是目前硅集成电 路进入特征尺寸为纳米的工艺阶段，以成品率为核心的可制造性设计成为其中的 研究热点，而版图设计阶段的成品率性能更是优化电路设计和制造工艺研究的重 要课题。 版图的图像格式不仅是随机缺陷热点检测的基础，而且也更有利于精确计算 版图的关键面积和后续版图的优化，更重要的是为集成电路成品率的提高奠定了 基础。本文以提高集成电路成品率和版图优化效率为目标，结合图像处理技术提 出一种将版图格式的文件转换为图像格式文件的算法。该算法以 CIF 命令和 BMP 命令为基础，不仅能实现 CIF 文件的图元转换为 BMP 图像，而且能完成整个 CIF 版图的转换。 此外，考虑到随机缺陷分布的版图设计是减少成品率损失的有效途径，文中 进一步研究了版图的布线优化问题。为了减少由冗余物和丢失物缺陷所引起的成 品率损失，需要提取版图优化线网的位置信息。本文提出了一种新的短路开路灵 敏度(NSOS)模型，并基于随机形状缺陷和随机形状线网实现了提取待优化线网位 置的算法。部分版图上的实验结果表明，NSOS 线网灵敏度模型可用于确定版图优 化线网的位置，为受缺陷影响的版图优化过程提供了精确的依据，从而实现了版 图优化系统性能的改进。 关键字：集成电路 成品率 版图优化 CIF 格式 BMP 格式 灵敏度  Abstract Abstract Integrated circuit yield optimization has always been a concern of the semiconductor industry, especially in the silicon integrated circuit into the feature sizes of nanometer process stage, yield as the core of manufacturability design has become the hot spot, and the yield performance of layout design phase is an important topic of optimization circuit design and manufacturing technology research. The image format of layout is not only the basis of random defects hot spot detection, but also avail to perform precise calculation the critical area and to optimize the layout. And the most important factor is that lay the foundation for the increase of yield. In this paper, the goal is to improve the circuit yield and the optimizing efficiency, and this paper proposes an algorithm of layout format file into image file format. This algorithm on the basis of CIF command and BMP command, it not only can realize that primitives in CIF are converted into BMP image, but also can complete the conversion in whole CIF layout. In addition, we consider the layout design of random defect distribution is an effective way to reduce the yield loss, this paper further study the layout optimization problems. It is essential to extract the position of nets from the layout in order to reduce yield loss are caused by redundancy material defect and missing material defect, and puts forward