薄壁微结构研抛装置关键技术研究机械制造及其自动化专业论文.docxVIP

哈尔滨工业大学工学硕士学位论文 哈尔滨工业大学工学硕士学位论文 - - II - Abstract It is widely appreciated that the development of precision manufacture has greatly changed our lives in terms of increased living standards. Nowadays a very important direction in precision manufacture is the miniaturization of the products. It is found that those miniature/micro components with microstructures possess some special functions including light guiding, antireflective and self - clean, etc. It is widely applied in communication, optics, automobile, aerospace as well as the national defense domains day by day. Based on the IC technology, the silicon microstructure machining method has it’s inherent deficiency, developed countries such as Japan, Germany and the US is stepping up the research of the theory, the equipment and the craft of mechanical machining for microstructure, also manufacturing of real 3D microstructure with high accuracy and good surface quality is urgently demanded. Compared with the conventional ultra-precision machines, micro machines has simpler structure, lower cost and energy consumption, better space utilization, and maintenance convenience, etc. thus studies on using the micro equipments to process the microstructure through mechanical method have great importance. This paper designed a special microstructure grinding and polishing equipment to remove deterioration level on micro groove of certain micro thin- walled component, the overall control scheme of the system is proposed. The equipment adopts the way of macro/micro motion combination, the macro- motion table uses stepper motor and ball screws to realize motion in long stroke, high speed and the micron level positioning; The micro-motion table uses the electrostriction appliance to actuate the flexible four bars mechanism to realize the small stroke, low speed, and the submicron level positioning; The macro/micro motion table uses the precise linear grating as close-loop position feedback, and the micro force/displacement