笔式连续直写的纳米加工技术研究-机械工程专业论文.docxVIP

II II 笔式连续直写的纳米加工技术研究 针法分别对 FPN 书写线结构的电学特性进行了测量。和二探针相比较，四探针法能 精确地测量单根线结构的电阻率，测得书写线结构的电阻率为 4.82μΩ·cm，略大于银 的体电阻率，这可能是由于微纳尺度线结构产生的表面散射效应增加了电阻率的值。 关键词： 纳米钢笔直写技术；毛细力；工艺优化；微纳结构 作 者：徐德洋 指导老师：孙立宁 Re Research on the Nano-direct Writing Process Technology using Fountain Pen Nanolithography PAGE PAGE IV Research on the Nano-direct Writing Process Technology using Fountain Pen Nanolithography Abstract Micro/Nano technology is a multi-disciplinary crossing high-tech field that shows great vitality and is listed as one of the important frontier of future technology. Scanning probe lithography, which based on SPM, is a kind of simple and flexible method to produce micro/nano materials and has got rapid development in recent years. As a new scanning probe technology based on AFM, Fountain pen nanolithography (FPN) possesses outstanding performances such as high accuracy and resolution, strong operability, general environment requests, continued writing and so on. FPN has been used to place a variety of inks in spatially precise locations on different substrates, write different patterns and fabricate high accurate devices. And FPN has a broad application prospect in biology and microelectronics. Due to the lack of studying controlled deposition of FPN, the working progress of FPN should be studied firstly. The formation and working mechanism of capillary force, which provide the theoretical basis for the mechanism of FPN, are analyzed. According to the strategy above, three steps of the FPN progress including the formation of the liquid bridge between the tip and substrate, the transfer of ink molecules in the liquid bridge and the diffusion in the substrate, are studied. And the contact force between the tip and substrate is analyzed and modeled. Then experiments of FPN writing with silver nanoparticle ink on gold substrate are carried out. The influences of various parameters on the diameters of dots and the sizes of lines are discussed, respectively. The diameters of dots are