基于原子力显微镜的微纳结构力学测试系统.docVIP

基于原子力显微镜的微纳结构力学测试系统 规械跨度2007,29(2):223～227 基于原子力显微镜的微纳结构力学测试系统 SIYS,I]EMFORMⅡCRO.NNO STRUCn瓜EBASEDONATOMC1oRCEMCROSCOPY 鲍海飞李昕欣张波郭久福韩建强 (1.中国科学院上海微系统与信息技术研究所,上海200050) (2.上海爱建纳米科技发展有限公司,上海200237) BAOHaiFeiLIXinXinZHANGBo2GUOJiuFuHANJianQiang (1.StateKeyLaboratoryofTransducerTechnology,ShanghaiInstituteofMicrosystemand InformationTechnology,ChineseAcademyofSciences,Shanghai200050,China) (2.ShanghaiAJNano-ScienceDevelopmentCo.,Shanghai200050,China) 摘要原子力显微镜是微纳米尺度科学研究中的一个精密仪器,从原理和应用,设备的软件,硬件的扩展都具有很 大的发展空间.随微纳机电系统的应用,非常迫切需要开发基于原子力显微镜的力学相关测试系统.在此情况下,着重 开发部分相关力学测试软件和系统硬件的扩展.基于原子力显微镜中的一个最基本的力一位移曲线功能,开发力学测 试软件,实施单点,多点的力曲线测量,疲劳度测量和单线扫描四个测试功能,系统在硬件上增添微动平台,具有较大的 横向位移,保证微纳结构尺寸的测试.相关测试表明,该软件具有较好的一致性和使用性,能方便地进行力学量的提取. 关键词原子力显微镜微纳结构硬件软件悬臂梁力学测试 中图分类号TH742 AbstractAtomicforcemicroscopy(AFM)isaverypreciseapparatursinthemiCIO-nanoscientificresearch.Fromthepointof viewoftheoryandapplications,thereisaverybigroomforthedevelopmentinthehardwareandsoftwareextensionofAFM.Withthe developmentofmicrosystem.itisveryimperioustodevelopthemechanicalmeasurementsystembasedon山eAFM.Undersuchasitu- ation.thisresearchemphasizestI1eresearchanddevelopmentofthemechanicalmeasurementsystemmainlycomposedofthesoftware editionandhardwareextension.Basedonthebuiltinfunctionofforce-displacementrelationshipinaAFM,amechanicalmeasurement system,onwhichfourfunctionssuchasthesinglepointmeasurement,multi-pointsmeasurement,fatiguremeasurementandsingleline seaRfunctionsaledeveloped.AmicroXYmovablestageisdesignedandimplementedforthemeasurementrequirementofmicrodevices withlargedimensions.ThemeasurementshowsthereisagoodconsistenceinfunctionsandconvinienceinUse,bywhichmechanicalpa- rametersCanbesubstractedeasily. KeywordsAicforcemicroscopy;Micro-nanostructure;HardwaI.e:Soi~vare;Cantilever;Mechanicaln豫_a鲺Ⅱn帅t Correspondingauthor:BAOHaiFei,E-mail:6∞@mail.skn.Ⅱc.en TheprojectsupportedbyHigh-techResearchandDevelopmentProgramofChina(No.863,2004AA4045),andtheNationalNatural ScienceFoundationofChina(No.6O376O38). Manuscriptreceived2