超低温压力传感器的结构设计微电子学与固体电子学专业论文.docxVIP

中北大学学位论文 中北大学学位论文 The Design of Ultra-low Temperature Pressure Sensor Structure Abstract Ultra-low temperature pressure sensor is a pressure sensor which works in low temperature environment within the range of 4K ~ 110K. In many types of pressure sensors， because of their special application environment , people are growing to pay more attention in the ultra-low temperature pressure sensors, especially in the case of more and more liquid hydrogen and liquid oxygen used as fuel. The ultra-low temperature pressure sensors are used in the fields of aerospace, industrial and transportation. This paper introduces the research status of ultra-low temperature pressure sensor at home and abroad. We discuss the working principle and design the structure of the ultra-low temperature pressure sensors. The article also innovative use polysilicon nanofilm as sensitive resistor and used it in the ultra-low temperature environment, opened up another application direction of the polysilicon film. The production process of the sensor designed in our paper is simple and compatible with IC technology, and need low production costs. In this paper, using the finite element analysis ANSYS software, modeling and analysising of stress field distribution of the elastic pressure membrane, determine the location and arrangement of the polycrystalline silicon pressure-sensitive resistor. On the basis of theoretical analysis, introduce the design process of each sensor parameters, including elastic membrane dimensions, varistor and layout design. On the basis of the research process, we draw the layout of the sensor processing according to the design of the structure, and design the process of the sensor and present the detailed process steps of the processing. In addition, the package structure design of the sensor and packaging technology conduct a preliminary study. Keywords: Polysilicon nanofilm, Varistor, Ultra-low temperature, Pressure sensor I I 目 录 1 绪论 1.1 超低温压力传感器的研究背景及意义