超声喷雾法制备太阳电池减反射膜的研究-材料物理与化学专业论文.docxVIP

河 河北工业大学硕士学位论文 超声喷雾法制备太阳电池减反射膜的研究 摘 要 提高太阳电池的光电转化效率是光伏研究中最重要的问题，然而，有 10%以上的 光能在太阳能电池的封装玻璃表面由于反射而损失掉。在玻璃表面制备减反射膜可以 起到增透作用，针对不同种类太阳电池的不同响应波段制备减反射膜可以使电池的转 换效率得到有效的提高。 本文探索性地采用成本低、设备简单、生产周期短的超声喷雾热解法和优化的超 声雾化模式制备出适用于不同太阳电池的 SiO2/TiO2 减反射薄膜。 研究了喷射距离、载气流量、前驱液的选择和流量、衬底温度、热处理时间等工 艺条件对薄膜结构和光学性能的影响，找到最优化的工艺条件并确定薄膜材料的光学 参数。发现 500℃时制备出的 TiO2 薄膜呈锐钛矿，SiO2 薄膜呈非晶结构，保温热处理 10min 后的折射率分别为 2.23 和 1.42。 根据所得单层薄膜的光学参数结果，结合光学薄膜理论，利用软件优化设计出适 用于非晶硅太阳电池的双层减反射膜系和适用于微晶、非/微叠层及晶硅太阳电池的 六层减反射膜系，理论平均剩余反射率为 1.193%和 0.879%。 根据膜系的优化结果，采用载玻片为衬底，制备出两种应用于太阳能电池的减反 射膜，使玻璃的透过率分别提高了 10.8%和 10.4%。通过附着性测试和机械性能测试 表明减反射膜具有较强的物理性能。 关键词：减反射膜，超声喷雾热解，TiO2 薄膜，SiO2 薄膜，太阳电池 i 超 超声喷雾法制备太阳电池减反射膜的研究 THE STUDY OF ANTIREFLECTION FILMS FOR SOLAR CELLS BY ULTRASONIC SPRAY PYROLYSIS ABSTRACT The most important issue of photovoltaic research is to improve the photoelectric conversion efficiency of solar cells. However, more than 10% of solar energy in the glass package is lost due to reflection. Preparation of anti-reflective film on the glass surface can play an antireflective role. For the different responses band of different types of solar cells, preparation of the antireflection film can increase the conversion efficiency effectively. In this thesis, the SiO2/TiO2 antireflection films for different kinds of solar cells were prepared by the ultrasonic spray pyrolysis, which has low cost, simple equipment, short production cycle, and the ultrasonic spray model optimized in the practice. In the ultrasonic spray pyrolysis, many process conditions have an influence on the films’ structure and optical properties, such as the spray distance, the flow rate of carrier gas, the choice and flow rate of precursor solution, the temperature of substrate and the heat treatment time, which were studied in this thesis. The most optimal conditions are found and the optical parameters of thin film materials are determined. We found that the crystalline nature of the TiO2 film was anatase, the SiO2 film was amorphous prepared at 500 ℃ , an