双联腔三振子无阀压电微泵的-研究与设计.pdfVIP

泵系统的研究和应用具有一定的理论价值。 关键词 双联腔三振子无阀泵；复合压电振子；连体腔；扩张/收缩管；微 流体流动；结构优化 万方数据 Abstract Microfluidic system is a technology of controlling, manipulating and detecting complex liquid in microcosmic size.Micropump is an important execution unit of microfluidic system,which indicates the developing level of microfluidic systems.Various types of micropumps have been developed,especially valveless micropumps with simple structure attract much more attention and have become focus of research in recent years. In this thsis,a new micropump is put forward named valveless micropump of an integration of double cavity with tri-vibrational film 。Its main units consist of the double cavities, the double diffusers/nozzles beside the cavities, the top composite piezoelectric vibrators, the middle one which connects the double cavities together, and the nether one. The new micro-pump has the advantages with simple and compact structure, easy manipulation, and a high reliability as well as a remarkably improved life-span. Transferring liquid with fineness, large runoff and high efficiency could be realized in the new type micro-pump. The main research content as follows: (1)A new valveless micro-pump is put forward with its working principle introduced. The thesis also offers the elementary design of the controlling project, actuating mode of the new micro-pump. The figures of the composite piezoelectric vibrators, the diffusers/nozzles pipe, cavity of the micro-pump and the cushion chamber are also primarily designed. (2)Key parts working in the new type micro-pump are established-- simplified