大功率射频激光电源DSP控制系统研究-光学工程专业论文.docx

摘 要 大功率射频板条 CO2 激光器包括板条电极结构、光腔结构、射频电源和控制系统 等几大核心关键技术，本文主要针对大功率射频激励电源，研究电源控制检测系统， 为激光器稳定可靠运行设计相关电路和软件。论文主要研究工作如下： ⑴分析 10KW 它激式射频电源的工作原理和系统电路结构、控制方式和控制流 程。射频电源包括射频信号发生器、300W 功率前置放大、电子管末级放大电路和定 向耦合器，工作频率为 95.6MHz，占空比从 10％~90％连续可调，最大输出功率 10kW， 用于驱动 1kW 射频板条激光器。 ⑵设计 DSP 射频电源控制系统。以 TMS320DSP2407 为核心，利用光耦 TPL521 输 入和输出的隔离，采用 MAX430 运算放大器把外部输入模拟采样信号转换为 DSP 可 以接收处理的信号，采用 CPLD 进行 I/O 口扩展，选用 SST39VF400 和 CY7C1021V 进 行存储器扩展。 ⑶以软件 CCS 作为开发平台，完成开关机的流程控制，自锁互锁保护，错误报警 输出和状态显示输出的程序编写。其中开机流程控制包括三种开机方式即内控手动、 内控自动、外控自动开，以满足不同场合下的开机要求。实现了对按键开关量如开 机信号、开冷却信号、开灯丝信号、开光闸信号、开高压等信号的检测，以及状态 开关量如缺相、风压、水压、灯丝电压、灯丝电流、栅极电压、栅极电流等信号的 检测，对屏压电压和屏压电流等模拟信号采样。 本文研究工作对于发展高功率、高光束质量 CO2 气体激光器，保证激光器稳定可 靠运行提供了理论基础和设计依据。 关键词：射频激光电源 DSP 控制系统 TMS320DSP2407 流程控制 状态检测 ABSTRACT The high power RF-excited CO2 laser comprises slab structure, resonator, RF power supply and control system. The control system has been researched in this thesis for high-power laser RF power supply, and the hardware and software have been developed for the stable and reliable operation of industry laser. The main contents of this thesis are as follows: ⑴ The research of the principle and structure, control modes and control processes for 10kW RF power supply have been done in this thesis, the power includes excitation part, 300W power amplifier, electronic tube amplifier and directional coupler, and works at 95.6MHz, with adjustable duty ratio of 1％~99％, the output power can reach 10kW, which can be used to drive 1kW slab CO2 laser. ⑵ Control system for high-power laser RF power supply has been designed. Based on TMS320DSP2407, according to the specific requirements of RF power control system, this thesis has completed the schematic and PCB. Photo-coupler is used to isolate output signal from input signal, MAX430 amplifier convert sampling signal from high voltage to the signal which can be used directly by DSP, CPLD is adapted to I/O expansion, CY7C1021V and SST39VF400 are used to external storage expansion. ⑶On the platform of CCS, progr