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锆钛酸铅压电陶瓷厚膜的超声体波时频域测试理论与方法凝聚态物理专业论文
哈尔
哈尔滨工业大学理学硕士学位论文
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- II -
Abstract
In recent years, the piezoelectric ceramics material has been more and more important used in the industry, civil and military. And zirconium titanic acid lead piezoelectric ceramics aslo called (PZT), because of the outstanding electrical machinery performance, curie temperature and stabile piezoelectricity performance, it is more advantage than other types of piezoelectric ceramics. In produces and life application, it is getting more and more used. Now, comparing the PZT thick film with its thin film, PZT thick film has the bigger driving force and the more obvious piezoelectric effect, and the PZT piezoelectricity thick film material not only has the merit of block body material but also the membranous material, therefore in the preparation of piezoelectricity, ferroelectricity and pyroelectric component, the PZT thick film has widespread application.
Ultrasonic measurement has high examination sensitivity, strong penetrability, the simple equipment and the inexpensive expense, and more importmantly, it does not have injury to the human body, so the ultrasonic measurement is becoming more and more important in life.
When material thickness d is smaller than its longitudinal wave length ??, we
call that this material is the thin layer material. If using conventional ultrasonic measurement, it is unable to separate its each echo signal, therefore we use frequency and time domain of low-frequency ultrasound measurement to characterize the thick film sample.
In this paper, we first use the frequency domain of ultrasound measurement, and then infer the theoretical calculation formulation which this experiment needs, according to the computational method of the thin layer based on the substrate, we infer the computational method of the thin layer which does not include the substrate. According to the formulation, we can calculate the speed, the thickness and the attenuation of PZT piezoelectricity thick film .We also carry the ana
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