不同衬底对NiO薄膜结构和光透过性能的影响.docVIP

不同衬底对NiO薄膜结构和光透过性能 的影响 王玉新臧谷丹胨苴苴崔潇文刘奇 辽宁师范大学物理与电子技术学院 采用溶胶-凝胶旋涂法分别以玻璃和IT0为衬底，制备出具有较高光透过性能的 NiO薄膜.进而利用X射线衍射仪（XRD）、扫描电子显微镜（SEM）、薄膜测厚 仪和紫外-可见分光光度计（UV-V1S）分别表征了 NiO薄膜的晶粒结构、表面形 貌、薄膜厚度及光透过性能，并计算了薄膜的光学带隙值.结果表明：不同的衬底 对NiO薄膜的结构和光透过性能具有一定的影响;在玻璃衬底上制备的NiO薄膜 晶粒尺寸大小均一丑沿NiO （200）择优生长，而在IT0衬底上制备的NiO薄膜 晶粒尺寸较小且薄膜厚度较薄.两者在可见光范围内的平均透过率均达到80%左 右，但在1T0衬底上制备的NiO薄膜在500nm左右有明显的吸收现象.并且在玻 璃衬底上制备的NiO薄膜光学带隙值达到3. 95eV. 关键词： NiO薄膜;溶胶-凝胶法;衬底;表而形貌;透过率; 王玉新（1974-），女，辽宁辽阳人，辽宁师范大学副教授，博 士. :HYPERLINK mailto:yuxinwangl78@yuxinwangl78@ 2017-05-03 基金：辽宁省教育厅科学研宂一般项目（L2015292） Structure and transmission properties of NiO films on different substrates WANG Yuxin ZANG Gudan CHEN Miaomiao CUI Xiaowen LIU Qi School of Physics and Electronic Technology, Liaoning Normal University; Abstract： NiO films with high light transmission on the glass substrate and the ITO substrate were successfully synthesized by sol-gel method. The crystal structural, surface morphology, film thickness and optical transmission spectra of samples were measured by XRD， SRM, Spectra Thick Series and UV-VIS，respectively. And their optical band gap values were calculated. The experimental results indicate that the NiO films on the different substrates had different structure and optical transmission. The grain sizes of NiO films synthesized on the glass substrates are uni form with preferred growth of NiO (200) axis. But the grain sizes of NiO films synthesized on the ITO substrate arc smaller and the thickness of films is thinner. The average transmittances in the visible range of NiO thin films are both around 80%, but the NiO films on the ITO substrate has an absorption phenomenon at around 500 nm. Meanwhile, the optical band gap width of the sample that is deposited on glass substrates is larger and reaches to 3. 95 eV. Keyword： NiO thin films; sol-gel spin-coating; substrate; surface morphology; transmittance; Received： 2017-05-03 P型半导体NiO其室温下禁带宽度在3. 6~4. OeV之间，是一种具有3d电子结构 的过渡金属氧化物ui，它不但具有优异的光学、电学、化学和磁学性能m,并 且其原料丰富、成本低廉、对环境污染小［3-4