高频响应音圈电机的建模与控制分析.pdfVIP

高频响应音圈电机的建模与控制研究 Abstract Voice Coil Motor (VCM) is a special kind of electromagnetic device, which generate linear motion or swing motion directly without any intermediate devices. It has many features such as high frequency response, high speed, high acceleration, high accuracy, simple structure, small size, light weight, strength characteristics, and easy control. In the semiconductor wire bonding, VCM is also widely adopted for its high positioning accuracy such as micron, submicron, and even nanometers. In order to improve efficiency, VCM works at high frequency, for example, the first-generation bonding machine work in the 10 lines/sec; the second-generation bonding machine works at 25 lines/sec and the third-generation bonding machine will reach 40 lines/sec, but many experiments show that the VCM positioning inaccuracy for complex hysteresis under 40Hz. Research on control and modeling of VCM under high frequency response is supported by the National Natural Science Foundation and other projects. The main research contents of this paper are as follows : 1) The history of VCM is reviewed, the structure of VCM is described and the research situation of VCM is introduced. The paper points out that there exists a problem of complex hysteresis for VCM in the case of high-frequency, high-speed, and this complex hysteresis is non-monotonic phenomenon. 2) The characteristics of complex hysteresis are analyzed and the C-S hysteresis model is improved