低摩擦快速平衡卸荷模糊控制精密伺服系统-机械电子工程专业论文.pdf.docxVIP

广东工业大学硕士学位论文快速响应平衡装置的摩擦力及低摩擦快速平衡卸荷模糊控制精密伺服系统的响 广东工业大学硕士学位论文 快速响应平衡装置的摩擦力及低摩擦快速平衡卸荷模糊控制精密伺服系统的响 应时间、抗干扰能力、工作平稳性以及被平衡之后试件的移动阻力等特性参数进 行了测定。对实验结果进行研究分析，验证了所提出来的低摩擦快速平衡卸荷模 糊控制精密伺服系统能充分发挥智能模糊PID算法优异的工作特性，能很好的 完成超精密机床垂直运动组件的配重任务。 关键字：智能模糊PID；精密伺服；无摩擦气缸；平衡卸荷系统；系统仿真 万方数据 AB锄l^CT AB锄l^CT AB STRACT In the field of ultra precision machining，vertical movement component IS relatively heavy,although can be balanced by the existing balance device，the resistance exercise is still large，which will cause the flow effect of drive motor,and thus affect the stability and precision ofthe machine t001．In the design ofmachine tool，therefore，how to balance out the gravity of the vertical motion components，in order to reduce the driving force after being balanced，thus meet the requirements of the velocity and acceleration，and improve the positioning accuracy，for the security of machine tool stability and precision of the stay will be of great significance．In this paper,the gravity balance system ofthe vertical moving parts ofthe ultra precision machine tool is studied， and the main contents are as follows： 1．According tO the working characteristic of ultra precision machine tools and other factors，select the use of pneumatic transmission to build gravity balance system of vertical motion components．Pneumatic experiments with a simple model to simulate the aerodynamic balance system in the use of ultra precision machine tool s，a proposed two kev technologies：without friction cylinder and seal chamber real-time precision constant pressure contr01． 2．According tO the relevant pneumatic technology of pneumatic balance system, the four aspects of low friction cylinder,pneumatic proportional servo valve,sel-vo control system and control strategy are compared and analyzed． 3，Through studying the development of low friction cylinder,combined with the gas lubrication theory，and on the basis of the basic structure of the cylinder,this paper proposes a comprehensive，full process gas friction-free rapi