铌酸锂微畴结构加工与检测-机械电子工程专业论文.docxVIP

优秀毕业论文 精品参考文献资料 摘要摘要 摘要 摘要 铌酸锂是一种非常优秀的人工晶体，它有着稳定的机械性能，耐高温、抗腐 蚀，易加工，价格低廉。并且它是集声光、压电和非线性光学等多种效应于一身 的多功能晶体，它拥有无机物中最大的非线性光学系数。通过对铌酸锂晶体的铁 电畴周期性反转制作的周期性极化铌酸锂(periodically poled lithium niobate， PPLN)已经广泛的应用于激光的倍频、光参量振荡和光波导等方面。 本文的主要研究内容是对铌酸锂微畴结构加工工艺的探究，主要包括以下两 个方面： 1．搭建了一套针尖加高压直写式的铌酸锂微畴结构加工实验平台，设计了相 关的机械结构，包括微动平台，支撑调平装置，针尖观察和调节装置，样品台等 多个部分的结构设计。组建了整个平台的运动控制系统，通过GALIL控制器实 现平台的运动控制和高压脉冲电源的控制，并且编写了PC端的控制软件。 2．实验了在不同条件下的铌酸锂晶体的点畴和线畴的制作。通过无损的偏振 光检测法观察到了制作好的畴结构，并通过USB采集设备采集到了相应的畴图 像。对比了电压、停留时间和速度这三个因素对畴尺寸的影响。得出表面畴结构 随着电压的增大或者加电压持续时间的增大而增大，随着速度的增大而减小的结 论。并在最后通过氢氟酸腐蚀法验证了偏振光检测得到的结果。 关键词：铌酸锂、畴反转、PPLN、偏振光无损检测、HF腐蚀法 万方数据 mechanlcalLithi mechanlcal Lithi啪niobate is an excellent synthetic crystal·It has stable and corrosion preVentlon·l ne propenies，the capacity of high temperature resistant lithium niobate 1s also a cn，stal can be伊owth easily and has a low price．And multi．觚ctionaI material which has a serious of properties such as acoustlc。optlcs， it has the blggest pizoelec仃onics and nonlinear optics，and the onentatlon ot nonlinear optical coe箍cients in inorganic materials．Through change 11thlum ferroelectric domains of lithium niobate periodically to make periodic Poled as second hamonlc generatlon niobate(PPLN)is widely used in several aspects，such and so。m 。f laser,optical parametric。scillation and optical waveguide of The main research direction of this thesis is explore the fabricatjon technlque the m micro domain stmcture of lithium niobate，and it primarily contains followmg to 1．A set of experimental system which use the technique by apply hlgh Voltage nlobate·We pinpoint has been put up to fabrication domain structure of lithium as the structures designed the related mechanical structures of this instrument，such of micro-motion platfom，suppot and adjusting system of platform，the obseⅣmg of the device of the pinpoint，s锄ple stage，etc．We also built the motion COntrol sYstem expe衄lental facilities，use the GALIL controller to control micro-motlon platto咖 PC side c∞仃ol pr