微机械谐振器可变锚点结构能量耗散特性分析-噪声与振动控制-上海.PDF

第35 卷 第5 期 噪 声 与 振 动 控 制 Vol 35 No.5 2015 年10月 NOISE AND VIBRATION CONTROL Oct. 2015 文章编号：1006-1355(2015)05-0039-04 微机械谐振器可变锚点结构能量耗散特性分析 1 2 张 厦 ，张文明 （上海交通大学 机械系统与振动国家重点实验室，上海 200240 ） 摘 要：微机械谐振器在振动过程中总会产生能量耗散，并且具有诸如空气阻尼耗散、热弹性阻尼耗散、锚点结构 耗散、表面耗散等诸多耗散机制，其中锚点结构耗散是一种主要的能量耗散机制。应用完美匹配层方法，将无限大区 域入射波的吸收问题转化到有限区域内进行。针对中心支撑圆盘体模态谐振器，设计两种不同的锚点支撑结构，并分 别讨论其几何结构的变化对谐振器固有频率和锚点损耗品质因子的影响。结果证明通过调整锚点结构，可以大幅度 提高谐振器的锚点耗散品质因子，提高能量的利用效率。 关键词：振动与波；微机械谐振器；锚点耗散；完美匹配层；结构优化 中图分类号：TB535.1 文献标识码：A DOI 编码：10.3969/j.issn. 1006-1335.2015.05.007 Energy Dissipation Analysis of Micromechanical Resonators with Variable Anchor Structures ZHANG Sha 1, ZHANG Wen-ming 2 ( State Key Laboratory of Mechanical System and Vibration, Shanghai Jiaotong University, Shanghai 200240, China ) Abstract : Energy dissipation of micromechanical resonators is always inevitable in vibration process. There are several energy dissipation mechanisms, such as air damping dissipation, thermo- elastic damping dissipation, anchor loss, surface dissipation and so on. Of them, anchor loss is the main energy dissipation mechanism. In this paper, the perfectly matched layers method was adopted to transform the incident wave absorption problem in infinite domain into that in finite domain. Two different anchor structures of centrally-supported bulk-mode disk resonator were designed. And the influence of the geometrical changes of the structure on the inherent frequencies and anchor loss quality factor of the