半导体并联生产线预防性维修调度和评估系统的设计与实现机械制造及其自动化专业论文.docxVIP

ABSlRACTABSTRACT ABSlRACT ABSTRACT This paper based on the research project comes from Sichuan Youth Foundation project‘‘Roundabout production process oriented multi-objective production planning research”．Semiconductor manufacturers u∞a large number of parallel flexible production lines，the flexible production lines arc produced by changing the parameters to process different products，but the multi-product production makes the preventative maintenance scheduling and preventative maintenance measuremem more difficult． Proper measurement of preventative maintenances is the basis of correct implmention of preventative maintenances scheduling while accurate scheduling is a prerequisite to implement preventive maintenance．This thesis is devoted to designing and developing a system to optimize the maintenance schedule and fred the proper measurement of parallel production lines in semiconductor factories． The beginning part is the modeling of preventative maintenance scheduling． Gives detailed analysis：of parallel production lines with multi-product in semiconductor factory．After the explanation of the various constraints which should be concerned in preventive maintenance schedule，establishes the preventive maintenance scheduling model which chooses the maximal of production as the objective function and multi-product production,preventive maintenance time windows，maintenance groups as the constraints。刀Ie successful solution of preventive maintenance scheduling example in a semiconductor manufacturing factory is the proof of the accuracy and usefulness of the model． The fowolling part is the metrics building of performance me船urement of preventive maintenance．Gives detailed analysis of the current classification of maintenance indicators．Chooses PM duration,follow-up product quality and equipment performance as the memembers of the measurement index system．The most popular machine performance metric has been found that it could be influenced by the man-made scheduling f