基于DSP的数控扫描隧道显微镜研制-电路与系统专业论文.docxVIP

基于DSP的数控扫描隧道显微镜研制-电路与系统专业论文.docx

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AbstractWith Abstract With its atomic scale resolution scanning tunneling microscope(STIr0 has found wide application in lots of fields,such as nano-mesurement,nano-electxonics,nano-materials, etc.Incorporation of digital signal processor(DSP)to make mlly di西吐zed STM has beo:0me all important approach in STM instrumentation.It pr;ovid∞more simplicity for instrument smlcture,more stabilityofperformance andmoreflexibilityoffunctionality. The thesis developed a fully digitized STM employing a DSP chip,TMS320VC5416, which take,charge ofall the logical control ofthe operation such笛X Y scan movement and feedback adjustment of the tip height along Z direction,the acquisition of the tunneling current.etc.The iHlage data were transmitted to a computer via serial interfac它 for post—ocessin舀display and storage,which greatly decreased the bllI_den of the computer.In above digitized STM 14 bit D/A converters AD7840 with a conversion time of 21ns and 12 bit D,A converters AD565 with a conversion time of 21ns we糟used for high precision X,Y and Z movement control of the STM piez-electro tube respectively. Me锄winle a 12 bit A/D COl3Verter MAXl20 with a conversion time of 1.6us Was used for tunneling current acquisition.The whole image scan process was under the control of a CPLD.As a result,a x,Y movement precision of0,lnm,a Z movetnent precision of O.01nm and a feedback control speed of 500KHz w6Te realized,which meet well the requirements for STM instntment. For software design the control program for TMS320VC5416 was composed under CCS environment and CPLD logic Was r髓lized using VHDL 1angIlagc.Correct】(,Y and Z control signal wore obtained based On these software.As the experiment shown,the.j above fully di萄也cd S刚based 011 DSP has a feedback control speed five times faster than that ofa STM based 011 ISAbus.which make possible ofmore stable operation. Key words:Scanning Tunneling Microscope,DSP,CPLD n ⑨ ⑨ 硕士擘位论文 MASTER’S THESI$ 华中师范大学学位论文原创性声明和使用授权说明 原创性声明 本人郑重声明:所呈交的学位论文,是本人

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