结构型TiO2氧传感器的制备及其电路设计-电路与系统专业论文.docxVIP

一 ‘ Also Also we can use it to detect gas，such as 02，CO，H2，etc． Having summarized the research fmdings and current development of Ti02 oxygen sensors，this paper adopts an innovation on PN junction structure based on the analysis of oxygen$ensol篙’testing principle and their working parameters．In this structure， current carriers come from the oxygen adsorption effect combine witll the ones from the both sides of PN junction’S neutral zone under the reverse bias voltage of PN junction, and finally this combination generates the current of our circuit．After measuring the current value，we can get the resistance of Ti02 film．Design of PN junction substrate can shorten the distance of current carriers and the combination of current carriers in sensitive films，also this design Can elevate the semitive characteristics of the sensor．In order to overcome the effect brought by temperature，the film on PN junction c,an be made into two parts，including Ti02 sensitive part and Si02 protective part．The output of our∞nsor is the difference of these two parts，in this way we can counteract the effect from temperature and make Our output more exactly．Next 1 will introduce the circuit of the oxygen sensor．Firstly,we should amplify the weak signal to make it easier to pick up．Then,we carl find the max value of our signal after sampling and holding on it．In order to change the data to the one that MCU can understand，an A／D converter should be used．Finally,make the consistency value of sensor displayed through I．C：D1 2864． Key words：oxygen sensor；Ti02 film；PN junction；MCU UVKHVSEa-n‘.?可·、，31‘，4BE- -ae 目 目 录 III 第1章绪论 ．1 1．1课题背景及研究意义 ．．1 1．2气体传感器概述 1 1．2．1气体传感器的分类与工作原理 ．．2 1．2．2气体传感器的主要应用 ．2 1．2．3气体传感器的发展趋势 ．3 1．3 Ti02薄膜气敏特性及其研究进展 ．3 1．4本课题研究的主要内容 ．4 1．5本章小结 5 第2章常用二氧化钛薄膜制备方法 6 2．1薄膜理论与性质 ．．6 2．2常用二氧化钛薄膜制备方法 7 2．2．1液相沉积法制备Ti02薄膜 7 2．2．2溶胶．凝胶法(SOL．GEL)铝t]备Ti02薄膜 ．8 2．2．3化学气相沉积法(CVD)制备Ti02薄膜 10 2．2．4水热法制备Ti02薄膜 12 2．2．5磁控溅射法制备Ti02薄膜 1 3 2．3本章小结 14 第3章 Ti02氧气传感器的研制 l 5 3．1 Ti02氧气传感器的总体结构没讨‘