硅基集成化电光调制器的研究-光学专业论文.docxVIP

本文研究结果表明，亚微米SOl脊形波导由于结构的特殊性而能够表现良好 本文研究结果表明，亚微米SOl脊形波导由于结构的特殊性而能够表现良好 的单模特性，其传输损耗小，适合做高速电光器件。采用亚微米SOI光波导设计 的基于微环谐振腔的电光调制器具有结构简单、器件尺寸小、工艺制作简单可行 等特点。在当代集成光通信领域将具有更广阔的应用前景。 关键词：集成光通信，亚微米SOI光波导，电光调制器，微环谐振器 U ABSTRACTABSTRACT ABSTRACT ABSTRACT Modern optical communication technology has been making significant progress toward integration of high—speed，high—capacity all-optical network on·chip．There has been a recent trend to generate，transmit,detecL control and apply light on a lligh-density integrated chip．The most important part is integration．Silicon has tmique advantages as a photonic medium．It is transparent in the range of optical telecommunications wavelengths and has a high index of refraction，which allows for the fabrication of high-index—contrast structures．In addition，the mature Si integrated circuit(complementary metal-oxide semiconductor,CMOS)technology enables the implementation of dense silicon-based integrated optics and electronics on-chip． Compact photonic waveguide devices witll superior performance and lower costs are required for large—scale integrated photonic integrated circuits．For this purpose， silicon·on-insulator(SOI)waveguide technology call be employed．Reducing the size of photonic waveguide devices for enabling high-density integration in silicon photonic integrated circuits is the subsequent trend．Researches on transmission characteristics of sub—·micron SOl--based optical waveguides and related devices become international academic difficulties and hot issues．Micro-ring resonator is one of the most important devices in integrated optical networks．The micro—ring Can perform a variety of functions such as filter，switch，and modulator and SO on．It is the basic component in Optical Add／Drop Multiplexer(OADM)．Electro-optical modulators and optical switches are key components in all—optical networks．Therefore，the research based on integrated SOI electro—optical modulator is essential for the entire optical communication networks． A simple