激光陀螺反射镜基片微晶玻璃的表面完整性研究-机械制造及其自动化专业论文.docxVIP

哈尔滨工业大学工学硕士学位论文 哈尔滨工业大学工学硕士学位论文 - - II - Abstract The glass-ceramic with ultra-low thermal expansion coefficient is a critical optical material, it has good mechanical properties and chemical stability under high temperature, so it has been employed in the aerospace, exploration of space objects and a variety of key equipments in other advanced technologies. However, after ultra precision machining, the existence of surface affected layer, sub-surface damage and surface residual stress directly reduces the intensity of optical components, long-term stability, image quality, coating quality, an