集成微流道的巨磁电阻(GMR)生物传感器研究-微电子学与固体电子学专业论文.docxVIP

第 第 I 页 集成微流道的巨磁电阻（ＧＭＲ）生物传感器研究 摘 要 本论文旨在研究一种 GMR 生物传感器，该传感器可以检测磁标记的生 物分析物，从而用于疾病诊断。利用 Comsol 软件模拟计算了垂直检测模式 下，磁珠的感应磁场以分析外磁场方位及磁珠位置和磁珠团聚对 GMR 生物 传感器检测的影响。模拟结果表明，外磁场倾斜、磁珠位置偏离电阻条中 心和磁珠团聚都会使 GMR 信号减小，特别是外加磁场的倾斜。因此，如果 用 GMR 传感器对磁珠进行定量检测，为了保证信号大小和磁珠个数的线性 关系，必须尽可能做到以下几个方面：外磁场尽可能垂直于传感器表面， 且测试过程中倾斜角不能变化；设法使磁珠集中于电阻条中间区域；尽量 保证磁珠不团聚。 制作了 GMR 生物传感器件, 并利用该传感器检测固定在传感器表面的 磁珠. 目前，国内外对集成 GMR 传感器与微流道，检测微流体中的磁珠或 磁标记生物分析物的研究则比较少。本论文在 GMR 传感器上集成了微流 道。在水平测试模式下，测试了不同浓度的铁磁流体。实验结果表明，GMR 传感器不仅能检测到铁磁流体，而且能根据信号大小确定铁磁流体的浓度。 关键词：GMR 传感器，流动检测，铁磁流体，生物检测 第 第 II 页 STUDY ON GMR BIOSENSOR INTEGRATED WITH MICROCHANNEL ABSTRACT This paper focuses on the study of GMR biosensor, which can detect magnetically labeled biological analyte and therefore can be used in the field of disease diagnosis. We use Comsol software to calculate the magnetic field of micro-beads magnetized by perpendicular magnetic field, to study the influence of orientation of external magnetic field, position of magnetic particles and aggregation of magnetic particles on signal of GMR-based biosensor. Simulation results show that the response of sensor would be reduced by the tilt of external field, the deviation of the position of particles from the central areas of the sensor strip, and the aggregation of particles. Consequently, to measure the magnetic particles quantitatively, efforts must be made to make the external magnetic field perpendicular to the sensor surface, and keep the tilt angle unchanged during the process of measurement; put the magnetic particles at the central areas of the sensor strip; avoid the magnetic particles aggregation. we fabricate GMR sensor, and then employ this sensor to detect magnetic micro-beads which are bound on the sensor surface. Currently, There are very few research groups which work on the integration of GMR sensor with micro-fluidic system and the detection of flowing magnetic beads. We test ferrofluid of different concentrations. Experimental results show that, GMR sensor can not only