MEMS陀螺仪技术简介与应用.ppt

Introduction of the gyroscope Principle of MEMS gyroscope 2 Applications of MEMS gyroscope 3 1 Introduction of the gyroscope What is usually called the gyro is a symmetric rigid body around a fulcrum to rotate at high speed. The geometric axis of symmetry is its rotational axis. As we all know, the object rotates at a high speed ,the angular momentum is very large. Axis of rotation will always point to a direction stably . The most basic effect of gyroscope is positioning. Principle of MEMS gyroscope ?A MEMS gyro measures rate of rotation around a particular axis by using Coriolis effect. Coriolis effect: Direction of motion: Angular velocity: Principle of MEMS gyroscope Most commercial MEMS gyroscope using a tuning fork structure. This structure is composed of two vibration and continue to move in the opposite direction of the object. If two objects in linear acceleration, they is to move in the same direction. Therefore, the capacitance change will not be detected. The MEMS Gyro will output zero or LSB. This means that the MEMS gyroscope is not sensitive to linear acceleration of the tilting or vibration. Principle of MEMS gyroscope Capacitance difference is proportional to the angular velocity. If the output is analogue signal, capacitance difference is converted to a voltage signal. If the output is digital signal , capacitance difference is converted to LSB. Anti-shake in digital camera: LENS , BODY. For example, VR image stabilization system in Nikon, IS image stabilization system in Canon 。 Applications of MEMS gyroscope Applications of MEMS gyroscope In the car, the yaw gyroscope can open the ESC to prevent the car from rolling in a sharp turn. Thanks for your attention！