新一代工艺及器件仿真工具Sentaurus课件.ppt

新一代工艺及器件仿真工具Sentaurus;课程内容;TCAD概述;Synopsys公司简介;TCAD概述;TCAD概述;Sentaurus Workbench介绍与使用;Workbench基于集成化架构模式来组织、实施TCAD仿真项目的设计和运行，为用户提供了图形化界面，可完成系列化仿真工具软件以及诸多第三方工具的运行，以参数化形式实现TCAD项目的优化工程。;SWB的工具特征;安装在137服务器下 利用putty软件在137中取得端口号： vncserver –geometry 1280x960 利用VNC软件登陆137服务器 ;打开软件指令：source /opt/demo/sentaurus.env GENESISe 重装license指令 su - （进入root，密码向机房管理员索取） /opt/sentaurus09/linux/bin/lmdown –c /opt/license/synopsys.dat (关闭license) /opt/sentaurus09/linux/bin/lmgrd –c /opt/license/synopsys.dat （安装license） exit (退出root权限);Creating Projects;;新建文件夹和项目 ;构造仿真流程 ;Creating Projects;Building Multiple Experiments;Building Multiple Experiments;Building Multiple Experiments;Building Multiple Experiments;TCAD概述;Sentaurus Process Simulator;Sentaurus Process;Sentaurus Process;Sentaurus Process;Sentaurus Process ;Sentaurus Process ;关键词;定义2D器件区域;;;;Mgoals.native;;;LDD和Halo（晕环）注入;LDD和Halo（晕环）注入;侧墙制备;;Source/Drain注入前网格再细化;Source/Drain注入;Source/Drain注入;接触孔;翻转;NMOS结构;NMOS结构;TCAD概述;Structure Editor的重要性;Sentaurus Structure Editor;Sentaurus Structure Editor;SentaurusSE 3D图例;How to use SDE;How to use SDE;How to use SDE;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generate 2D boundaries？;How to generating doping profiles;How to generating doping profiles;How to generating doping profiles;How to generating doping profiles;How to generating doping profiles;Generating Meshes;Generating Meshes;Generating Meshes;Multibox Mesh Strategy in Refinement Windo