第三章 真空技术.pptVIP

* 操作步骤 所以detaV决定了抽速 罗茨泵：抽速大，103 L/s, 可抽到10-5 torr，高压强下, 泵排气会产生很大热量, 引起转子膨胀, 损坏泵体,所以需要前级泵, 都是通过气体的膨胀与压缩，排气 其它样式的罗茨泵 * 工作温度在20K的泵可以达到10-10 Torr 10K, 除H2/He/Ne的所有气体饱和蒸气压均低于10-22Torr 20K~80K, P(T) 10-9Torr 低温捕集：一种气体在另一种气体凝成的多孔性冷凝物上面或内部的吸附, 氩对氢的低温捕集 低温吸附：可将蒸气抽到远低于其饱和蒸气压的压强(H2/He/Ne);若单分子层覆盖很小，表面饱和蒸气压强可降低到蒸气自身的冷凝物上方饱和蒸气压的10-1 ~ 10-12倍 容器越大，越需要多个泵联合工作 * 抽速可达103 L/s，(和罗茨泵的对比) 抽速快，要求入口很粗 * 湿泵不适用于存在反应气体的腔体 * * 优点：响应速度快 缺点：需要校正，对于不同的气体，常有不同的测量范围 * Vacuum Regulation The vacuum regulator maintains a steady vacuum level in the system by admitting air into the system to balance incoming air with the amount of air being removed by the vacuum pump. When more air is entering the system than being removed, the vacuum level drops and the regulator closes. If more air is being removed than is entering, the vacuum level rises and the regulator opens to admit air. A good regulator will respond quickly to vacuum level changes and minimize vacuum fluctuation in the system. The ability of the regulator to respond to vacuum fluctuations depends upon the characteristics of the regulator as well as where it is located in the milking system. A test of the response of the regulator to vacuum fluctuations is part of a thorough system analysis performed by a service technician. The ultimate test of effectiveness of vacuum regulation is the vacuum stability during milking. According to ASAE standards, the mean equilibrium vacuum in the receiver should not drop more than 0.6 Hg (2kPa) below the normal vacuum level during milking. This level should be maintained even during cup attachment and removal, liner slips, and unit fall off. * 操作步骤 Pirani Gauge （100 ～10-4Torr） 1 x 10-9 Torr to 10-11 Torr 高真空测量： 电离规(Ion Gauge) 真空计的工作范围 10-12 10-10 10-8 10-6 10-4 10-2 1 10+2 P (mbar) Rough Vacuum High Vacuum Ultra High Vacuum Bourdon Gauge Thermocouple Gauge Cold Cathode Gauge Capacitance Manometer Hot Fil. Ion Gauge Residual Gas Analyzer Pirani Gauge Spinning Rotor Gauge McLeod Gauge 压强控