2021年外文翻译及文献综述规范与要求新版.docVIP

毕业设计（论文）——外文翻译（原文） Electrode layout of ZnO pyroelectric sensors Abstract In the present study, an electrode layout of pyroelectric sensors is developed to improve electric signals. Voltage responsivity is a main target to enhance the performance of pyroelectric sensors. A partially covered, top electrode has been proven to effectively increase the voltage responsivity of pyroelectric sensors. In the experimental results, the proposed electrode layout with an array type in ZnO pyroelectric sensors possessed higher voltage signals, about 3.6 times that of a fully covered type, and about 2 times that of a partially covered type. Moreover, a finite element model is used to explore the temperature variation rate in ZnO pyroelectric sensors for both the fully covered and the partially covered electrodes. In the simulation results, the partially covered electrode can indeed improve the temperature variation rate in the ZnO layer. Keywords: MEMS; Pyroelectric; Sensor; ZnO 1. Introduction Multilayer pyroelectric sensors have been successfully used in many applications, such as pollution monitoring, hot image detectors, intruder alarms, and gas analysis. They possess many advantages including non-cooled detection, room-temperature operation, lower system costs, fast speeds, port-ability, having a wide spectral response with high sensitivity and being integrable with on-chip circuitry [1-3]. The conventional pyroelectric sensors are comprised of a pyroelectriclayer sandwiched between top and bottom electrodes. The topside is exposed to a heat source. The dynamic response currentof pyroelectric sensors is proportional to the temperaturevariation rate of pyroelectric layers [1]. A higher temperaturevariation rate in the pyroelectric layer leads to a higher response current for the pyroelectric sensors. A partially covered,top electrode has been proven to result in a higher responsivity than that of a fully covered electrode because it opens windows for the ZnO