《大气污染》英文课件第9章3一次颗粒物的控制.ppt

Clean Room Technologyand HEPA Filters(Reading) Introduction The use of clean rooms in industrial facilities is rapidly expanding in computer manufacturing and electronic clean room assembly pharmaceutical production bioengineering isolation wards and surgical theaters food processing aerospace They rely on the effectiveness of HEPA filters HEPA Filters What are HEPA filters? High efficiency particulate air filters dry- type filters in a rigid frame having a minimum particulate collective efficiency of 99.97% for a 0.3 m particle First developed by the Atomic Energy Commission during World War II to remove radio active dust from their plant exhaust HEPA Filters have a deep bed of randomly positioned micro glass fibers. 由叠片状硼硅微纤维制成的，像纸一样。 total bed depth is very large in comparison to the average fiber diameter. Commercial Available HEPA Filters Generally mounted into clean room ceiling, walls or benches and provide filtered air flow. Other Critical Subsystems Temperature Control generally are driven by human comfort, process requirements, and product protocols. Workers in clean room are generally gowned in Gore-Tex or Tyvek(高密度聚乙烯合成纸) coveralls with face masks, goggles, hoods, wrist covers etc Other Critical Subsystems Humidification humidity specifications are also driven by human comfort, product protocols and process requirements In the case of humidification, clean steam must be generated from purified water before injection into supply air duct downstream. Care should be taken so that condensation does not occur on the ductwork which may cause fungal(真菌) growth Other Critical Subsystems Pressurization Since no clean room can be constructed free from leaks, the air pressure in a clean room must be higher than the air pressure of the less-clean adjacent spaces. This pressure differential ensures that air always flows out of crack openings in the clean room into less-clean areas Other Critical Subsyste