PVD涂层介绍中文.pptxVIP

PVD涂层介绍中文第1页/共21页 Arc PVD Coating 概要利用PLASMA在TARGET表面使用ARC，E-Beam，Direct heating 等蒸发金属物质后增加加速Bias电压在产品表面蒸着的真空法。Titanium(Ti) is vaporized, ionized and accelerated in one step by the arc, e-beam,direct heat.Reactive gas is added to the metal ions and ionized. All ions are accelerated towards the workpiece by the BIAS voltage TargetCathodeN2Reactive gasWorkpieceTiNTi+ Ti++ 0 ~ -1000VBIAS VoltageBIAS VoltageVaporization, ionizationSolid Target( Ti )Ti++ Ti++ Ti+ Ti+ 0 ~ ?ArcE-beam Direct heatHeated ion cloud = Plasma东宇热处理工业（株） 第2页/共21页 PVD Coating 特征● 高硬度 （High Hardness）● 高密度的组织 （Dense Structure