RHEED原理及说明完整版.ppt

RHEED (reflection high-energy electron diffraction) Yi Li BackgroundThe first RHEED experiment was conducted by Nishikawa and Kikuchi in 1928.The origin of patterns, especially the streaks, were explained in detail by using kinematics diffraction theory (Kirchner and Raether, 1932; Raether, 1932).Arthur and LePore incorporated a RHEED measurement into an apparatus developed by Arthur for the molecular beam epitaxial (MBE) growth of GaAs.Harris et al. (1981),Wood(1981), Neave et al. (1984),Van Hove et al. (1983b)and Sakamoto et al. (1986)saw intensity oscillations, RHEED became essential for measuring growth rate. Electron Diffraction TechniquesLow Energy Electron Diffraction (LEED) (E: 10 ~ 500 eV) Electron wavelength: 0.5 ~ 4? Penetration length: 5 ~ 10 ?2 Reflection High-Energy Electron Diffraction (RHEED) (E: 5 ~ 100 keV) Electron wavelength: 0.02 ~ 0.2 ? Penetration length: 20 ~ 100 ? A high energy electron gunA fluorescent screen RHEED Instruments Principles of RHEEDBrief of the Diffraction Theory(1)Ewald Sphere and Laue equation (Laue equation) We know (2) Bragg diffraction The figure shows the Ewald sphere of the incoming electron waves and the reciprocal space map of a periodic structure. Where the Laue equation is met, the Ewald sphere of the incoming electron waves will intersect the reciprocal lattice rods of the surface of the sample. This will result in streaks of spacing s on the florescent screen. As the radius of the Ewald sphere is about two orders of magnitude greater than the modulus of the reciprocal lattice vector, we find that the angle ? between points intersecting the sphere will be almost the same k = 50?-1 for 10keV electronsa* = 2?-1 for a = 3?the Ewald sphere is very large compared to reciprocal vector,so it cuts the reciprocal rods almost along its length. RHEED patternFlat-streaks:Incident angle widthEnerg