XPS数据处理中的峰形和背景扣除.pdf

291Vol.29,No.1

20111PhysicsExaminationandTestingJan.2011

XPS

张滨,孙玉珍,王文皓

(,110016)

:PS,

:PS;;

:A:2011)

LineShapesUsedinXPSandBackgroundSubtraction

ZHANGBin,SUNYuzhen,WANGWenhao

(AnalysisandTestingDivision,InstituteofMetalResearch,

ChineseAcademyofSciences,Shenyang110016,Liaoning,China)

Abstract:ThelineshapesusedinPSandtheircombinationwereintroducedindetail;thebackgroundsubtraction

methodsandtheireffectsonanalysisresultswerediscussedaswell.

Keyword:PS;lineshape;backgroundsubtraction

,

1峰型函数

,

,,

()(Gaussian)(Lorentzian)

:

,,(Lorentzian):

:(E-E0)2-1

,L(E)={1+[]}(1)

,,,(Gaussian):

!(E-E0)22

G(E)=exp{-ln2[]}(2)

(G/L)

,2FWHM(FullWidthatHalfMaximum,

,,),GaussianLorentzian

1

,,

,

,,,

,

:G/L

PS(

1

)ig.1LineshapesofGaussianandLorentzian

:(1978),,,;Email:binzhang@imr.ac.cn;:

1:PS∋19∋