超精密抛光机床设计及床身动态特性分析.pdfVIP

超精密抛光机床设计及床身动态特性分析*

摘要：为满足光学元件表面精密抛光加工的需要和减少加工与检测中二次装夹产生的误差，文中设计研发了一款

集精密抛光加工与测量一体化的超精密抛光机床，并对其进行动态特性分析。首先，应用ANSYSWorkbench对机床床

身模型进行模态分析，得出前6阶固有频率均在100Hz以内；然后，对机床床身样机进行试验模态测试分析，测试结

果与仿真结果基本吻合，误差小于7%，验证了建立的有限元模型具有良好的精度；最后，基于有限元模型，在模态分析

的基础上对机床整机进行动态特性分析，分析环境振动和加工振动对机床的加工平台、测量平台等关键位置的振动特

性的影响。结果表明：研发的机床结构合理，具有良好的稳定性，为我国超精密机床结构的设计与优化提供了参考与

理论依据。

关键词：超精密加工；机床设计；动态特性

Designofultra-precisepolishingmachineandanalysison

dynamiccharacteristicsofmachinebed

Abstract:Inthisarticle,inordertomeettherequirementsofsurfaceprecisepolishingofopticalcomponentsandreducethe

errorsgeneratedbythesecondaryclipintermsofprocessinganddetection,anultra-precisepolishingmachinewithacombination

ofprecisepolishingandmeasurementisdeveloped;itsdynamiccharacteristicsareanalyzed.ANSYSWorkbenchisusedtocarry

outmodalanalysisonthemodelofthemachinebed.Theresultsshowthatthefirstsixnaturalfrequenciesareallwithin100Hz.

Then,theprototypeofthemachinebedissubjecttoaseriesofexperiment,testandmodalanalysis.Itisshownthattheresults

arebasicallyconsistentwiththoseobtainedfromsimulation,andtheerrorislessthan7%,whichhasverifiedthatthefinite-ele-

mentmodelenjoysdesirableaccuracy.Finally,basedonthefinite-elementmodelandthemodalanalysis,effortsaremadeto

explorethewholemachinesdynamiccharacteristics,aswellastheinfluenceofenvironmentalvibrationandprocessingvibration

onthevibrationcharacteristicsofthekeypositionssuchastheprocessingplatformandthemeasuringplatform.Itisshownthat

thismachinehasreasonablestructureanddesirablestability;thisstudyprovidesreferenceandtheoreticalbasisfordesignand

optimizationofultra-precisemachinestructureinourcountry.

Keywords:ultra-precisepro