全气体静压环形抛光机床的研制及应用.pdfVIP

全气体静压环形抛光机床的研制及应用

摘要：针对单轴抛光机面形控制难度大、较多依赖人工经验，无法满足光学元件激增的数量和精度需求的问题，提出研制

一种新型超精密环形抛光机床。首先引入抛光盘跳动为变量构建基于Preston公式和赫兹接触理论的材料去除模型；模

型仿真分析表明抛光盘跳动误差变化会导致材料不均匀去除，而主轴跳动误差和导轨直线误差会直接影响抛光盘的面

形修正和测量精度。然后基于此结论，利用静态、模态、谐响应分析对机床整体布局和横梁支撑形式进行优化；同时设计

气体静压导轨和主轴以提高直线运动精度和主轴回转精度。最后为了验证机床精度和加工指标，采用LK-G5000激光

传感器检测导轨和转台的运动误差分别优于1.2μm/400mm和0.4μm。对⌀300mm的UBK7光学元件进行抛光，8小

时后粗糙度和PV值分别优于Ra0.56nm和1/10λ。结果表明：所研制的超精密环形抛光机床达到了设计要求。

关键词：超精密机床；环形抛光；气体静压主轴；气体静压导轨；材料去除模型

Developmentandapplicationoffullgashydrostaticring

polishingmachine

Abstract：Consideringkeychallengesthatincludecontrollingthesurfaceshapeofasingle-axispolishing

machine，greaterrelianceonmanualexperience，andthenecessitytomeetdemandssuchastheincreasing

numberandprecisionofopticalelements，anewultra-precisionringpolishingmachineisproposed.First，

amaterialremovalmodelbasedonthePrestonformulaandHertzcontacttheorywasconstructedbyintro⁃

ducingthethrowndiscrunoutasvariable.Modelsimulationanalysisshowsthatrunouterrorvariation

leadstounevenremovalofmaterials，andthattherunouterrorofthespindleandthelinearerrorofthe

guiderailwilldirectlyaffectthesurfaceshapecorrectionandmeasurementaccuracyofthedisc.Basedon

thisconclusion，themachinetooloveralllayoutandbeamsupportformwereoptimizedusingstatic，modal

andharmonicresponseanalysis.Atthesametime，thehydrostaticguiderailandspindleweredesignedto

improvelinearmotionandspindlerotationaccuracy.Finally，toverifythemachinetoolaccuracyandma⁃

chiningindex，themotionerrorsoftheguiderailandturntablearebetterthan1.2μm/400mmand0.4

μm，respectively，usingtheLK-G5000lasersensor.⌀300mmUBK7opticalelement