考虑非线性尺蠖建模与运动控制研究.pdfVIP

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考虑非线性尺蠖建模与运动控制研究.pdf

ModelingandMotionControlofInchwormConsidering

Nonlinearities

Yeung-ShikKim*,InsooKim*,KibumKim*

*SchoolofMechanicalEngineering,KumohNationalInstituteofTechnology,Korea

Thispaperproposesanewmodelingschemetodescribethehysteresisandthepreloadcharacteristicsof

piezoelectricstackactuatorsintheinchworm.Fromtheanalysisofpiezoelectricstackactuatorbehavior,the

hysteresiscanbedescribedbythefunctionsofauminputvoltageandthepreloadcharacteristicsare

identifiedbythepreloadweight.Thedynamiccharacteristicsarealsoidentifiedbythefrequencydomainmodeling

techniquebasedontheexperimentaldata.Forthemotioncontrol,thehysteresisiscompensatedbytheinverse

hysteresismodel.Sincethedynamicstiffnessofaninchwormisgenerallylowcomparedtoitsdrivingcondition,

themechanicalvibrationmaydegradeaccuracyoftheinchworm.Therefore,theSMC(SlidingModeControl)and

theKalmanfilteraredevelopedfortheprecisionmotioncontroloftheinchworm.Thefeasibilityoftheproposed

modelingschemeandthecontrolalgorithmistestedandverifiedexperimentally.

1.INTRODUCTION

Theneedofthehighprecisiondrivingequipment(1)isbeingdramaticallyincreasedinthefield

ofsemiconductors,LCDequipments,machinetools,cellbiolog

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