microPRO RTP微波PRO RTP半导体制造设备355nm激光源、300mm 150mm硅片、GMR TMR传感器制造用户手册.pdf

microPRO RTP微波PRO RTP半导体制造设备355nm激光源、300mm 150mm硅片、GMR TMR传感器制造用户手册.pdf

microPROTMRTP

SelectiveLaserAnnealingSystemforSemiconductorApplications

ThemicroPROTMRTP,anewlaserannealingsystemdesignedtoThemicroPROTMRTPaddressesavarietyofapplications,

enableseveralkeyprocessstepsinsemiconductor,powerde-including:

vicea

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