基于带通滤光片的平面工件面形干涉测量方法.pdfVIP

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基于带通滤光片的平面工件面形干涉测量方法

王凯，闫英，周平

（大连理工大学机械工程学院，辽宁大连116033）

摘要：

针对目前工业领域对平面零件面形低成本测量需求，提出了一种基于带通滤光片的干涉测量方法。该方法根据分

振幅干涉的原理，使用两个中心波长相差10nm的滤光片分别放置在工业摄像头上，拍摄两组准单色光干涉图样，通过对

比处理实现干涉条纹级数排序。然后使用Zernike多项式对完成排序的干涉图样进行拟合，获得环形工件面，最后应用最

小二乘法摆正，获得所测工件的面形精度信息。通过理论分析及实测对比验证了该方法的可行性。

关键：

滤光片；分振幅干涉；图像处理

中图分类号:TH744.3文献标志码:粤文章编号：员园园圆原圆猿猿猿（圆园22）12原园063原园4

InterferometryMeasurementMethodofPlanarWorkpieceSurfaceProfileBasedonBandpassOpticalFilters

WANGKai，YANYing，ZHOUPing

(SchoolofMechanicalEngineering,DalianUniversityofTechnology,Dalian116033,China)

Abstract:Aimingatthelow-costmeasurementrequirementsofplanarworkpieceintheindustrialfield,aninterferometric

measurementmethodbasedonband-passopticalfiltersisproposed.Accordingtotheprincipleofamplitude-splitting

interference,themethodusestwoopticalfilterswithacenterwavelengthdifferenceof10nm,respectively,placedonan

industrialcameratocapturetwoquasi-monochromaticlightinterferenceimages,anddeterminetheordinalofinterference

stripes.TheZernikepolynomialisusedtofitthesortedinterferenceimagestoobtainthesurfaceprofileoftheplanar

workpiece,andfinallytheleastsquaresmethodisappliedtostraightenthesurfaceprofileofthemeasured