微电子学资料part2 2006 Design_of_a_Process.pdfVIP

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微电子学资料part2 2006 Design_of_a_Process.pdf

IssuesinDesignofCMOSProcess

Severalelectricalanddesignconsiderationsdeterminelevel

ofdoping,maskdimensionsandjunctiondepthsinagiven

technology.

Arealisticdesignofaprocessrequiresuseofbothprocess

anddevicesimulators.Togiveageneralideaonhowthe

calculationsarenormallydone,wewilllookatdesignof

somestepsinCMOSprocess.Theformulasthatmaybeused

forimplantanddiffusionprofilecalculation,deviceequations

andsomedataaregivenhere.Otherdataandformulascanbe

foundinvarioustexts.

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