微电子学资料oxidation 2.pdfVIP

3.OxideProperties

3.1OxideDensity

❑Ingeneral,highergrowthrate→lowerdensity.

(Dryoxidationinlowertemperatureproduceshigherdensity.)

❑Lowdensityofoxide:

➢lowerrefractiveindex

➢higheretchrateindiluteHFsolution

❑But,thermaloxidehasamuchhigherdensity,comparedallkindsofCVDoxides.

3.2OxideStress

❑Thermaloxideonsiliconisinastateofcompressiononthesurface.

(intherangeof~109dyne/cm3)

❑Viscousflowofthermaloxideoccursataround960C.

Abovethistemperature,stressreliefe