基于数值模拟方法的单晶硅表面微构型制造研究.docVIP

  基于数值模拟方法的单晶硅表面微构型制 造研究# 韩雪松* 5 10 15 （天津大学机械工程学院） 摘要：显微探针技术的突破以及高端 MEMS 的性能需求促使微纳尺度三维表面结构/构型制 造技术的研究不断深入。随着器件尺度的不断缩小，表面微制造技术越来越依赖于微纳尺度 摩擦学行为，经典连续介质力学无法准确解释发生在这一尺度的一系列现象。为此，本文采 用大规模分子动力学仿真技术研究发生在原子分子尺度的这一复杂行为。研究表明，微纳尺 度硅片表面制造中材料主要产生塑性变形并限于局部微小区域。与宏观大尺度材料塑性流动 实现机制不同，小尺度材料塑性变形/材料去除主要基于克服原子所在晶面相对滑移需要的 屈服应力。当探针刻划深度在 10 纳米以下时，残余沟槽深度远小于初始设定数值，说明工 艺参数较小时探针基制造表面主要发生基于材料弹-塑性变形的弱磨损。在微纳尺度材料的 自组织特性及探针及探针尖端效应综合作用下，基于显微探针技术的制造表面微结构只能是 概念构型的相似形。研究还发现，微纳尺度表面构型制造中的摩擦学行为具有明显的各向异 性，沿着[100]晶向的材料变形程度大于[001]晶向材料的变形程度。 关键词：机械制造及其自动化；显微探针；微构型；分子动力学；单晶硅 中图分类号：TH161+.14; 0733+.9; TH117.1; TH145.9 20 Investigation the physical essence of microstructure fabrication in silicon surface using numerical simulation method hanxuesong 25 30 35 40 (School of Mechanical Engineering, Tianjin University) Abstract: The emergence of tip-based microscopy has allowed research effort on micro- and nanoscale fabrication techniques specifically aimed at small three dimensional pattern/structures. As the dimensions of components continue to decrease, tribology behavior at the micro- to nanoscales become very important on the physical essence of nanoscsale surface fabrication. Traditional continuum mechanics cannot give reasonable explanation about the phenomenon at this length scale. Molecular dynamics simulation can enable us employing large scale computer simulation to investigate this complex process and gain insights into this atomic scale behavior. As the size of the region undergoing plastic flow becomes much smaller than the typical distance between dislocations, the contribution of dislocations to the yield stress becomes insignificant while the yield stress is governed by the force needed to slide one plane of atoms over another. The residual depth of the groove is minors comparing with the original scratch depth which justify that AFM based nanolithography would be little-wear friction at the small depth of scratch (less than 10 nanometers). The final surface micro-structure acquired by AFM ba