铜互联层游离磨料超精表面制造工艺中颗粒复杂作用数值分析.docVIP

  铜互联层游离磨料超精表面制造工艺中颗 粒复杂作用数值分析# 韩雪松* 5 10 15 20 25 30 35 40 （天津大学机械工程学院） 摘要：铜互连层超精表面制造主要由化学机械抛光工艺实现，而化学机械抛光的功能实现与 抛光液中游离磨料（颗粒）的复杂行为密切相关，抛光颗粒尺度远小于传统磨削加工磨粒尺 度，材料去除单位尺度为原子/分子团簇，传统的连续介质力学无法对化学机械抛光中的现 象给予合理解释。为此，本文采用大规模分子动力学仿真研究了固体表面与抛光颗粒之间的 复杂作用及表面平坦化的物理本质。研究表明，颗粒动能以及冲击角度决定了粒子传递给材 料表面的能量进而影响材料去除速率，最终创成表面是不同控制机制下的粒子行为协同作用 的结果，因此原子尺度上抛光表面应是几何离散区域集而非单一连续光滑区域。 关键词：机械制造及其自动化；化学机械抛光；数值分析；分子动力学；复杂行为 中图分类号：TH161+.14; TP399; TG701; TG706 Numerical analysis the complex mechanism about free abrasive ultraprecision surface machining of copper interconnection layer hanxuesong (School of Mechanical Engineering, Tianjin University) Abstract: The ultraprecision surface machining of copper interconnection layer is realized by Chemical Mechanical Polishing (CMP) while the appropriate functional realization of CMP is closely related with complex behavior of free abrasive (slurry particle). The abrasive size employed in the CMP far less than that employed in the traditional grinding, material removal during CMP is on the order of atoms and molecules or clusters of atoms and molecules. Classical continuum mechanics cannot give a reasonable explanation about the phenomenon in the CMP. Large-scale classical molecular dynamic (MD) simulation of tribology interaction among nanoparticles and solid surface and the surface morphology have been carried out to investigate the complex physical essence of surface planarization. The results show that simultaneous impact of several abrasive particles or the repeated impact of abrasive particles leads to material failure. The results also justify that no single wear mechanism dominates all operating conditions, different wear mechanisms operate, with their relative importance changing as the sliding conditions change. The velocity and angle of approach of the abrasive particles will determine the kinetic energy that the particles transfer to the surface, and hence will affect removal rates. The real finished nanometric surface should be the mathemat