扫描电镜在材料表征中的研究应用本科论文.doc

PAGE 毕 业 论 文（ 2012 届）题 目扫描电镜在材料测试表征中的应用研究扫描电镜在材料表征中的应用研究摘要:电子显微技术是材料表征的重要技术手段之一，其中扫描电子显微镜（简称SEM）由于具有应用范围广、样品制备简单、图像景深大等优点，因而在材料表征中发挥着越来越重要的作用。本文在介绍扫描电子电镜的发展历史、电子光学原理、扫描电镜样品的物理信号、扫描电镜的结构及工作原理的基础上，通过在不同操作条件下对不同类型样品的观察，系统研究了仪器条件如扫描电镜电子枪类型、操作条件如灯丝电压和工作距离、样品制备方法如生物样品和非导电样品的预处理方法等因素对SEM图像质量的影响。研究表明，要获得高质量的SEM形貌像，必须做以下几点：（1）选择合适的仪器是前提。对于观察纳米尺度的样品必须选择场发射电镜，因为只有场发射电镜才具有纳米分辨率。（2）采取有针对性的制样方法是关键。对于生物样品，必须进行冷冻干燥，对于导电性差的样品则必须镀导电膜。（3）选择适当的观察条件是核心。应根据样品类型和特点调整灯丝电压、工作距离、对比度和亮度等参数。（4）细心操作是保证。只有仪器操作者耐心细致的操作才能最终获得清晰简洁、信息丰富和富有美感的图像。关键词：扫描电镜；材料表征；图像Applying Research of Material Characterization with Scanning Electron MicroscopeAbstract: The electron microscope technology is one of the important characterination technology in material research. The scanning electron microscope (SEM) is widely used and playing a more and more important role role in material characterization because SEM has a series advantages. First of all, the article introduced a history of the development of SEM, the photo system of electron litht, the signals of sample, the structural characteristics and the working theory of the scanning electron microscope. By operating under various conditions and with different kinds of samples, the affacting factors such as the type of electron guns, the accelerating voltage and working distance, the methods of sample preparation are researched systematically. The research showed that in order to obtain a good SEM photo, the following steps must be taken. (1) Slect a suitable equipment. For example,if you want to test nanometer smaples you must choose a SEM with field emmision gun because only a machine with field emmision gun can qive nanometer resolution. (2) Prepare the sample carefully. If the sample is unconductive, make it conductive. (3) Choose a suitable condition according to the samples, such as the accelerating voltage and working distance. (4) Operating carefully because the operater plays a key role in the process.Keywords: scanning electron microscope, material cha