半导体界统计和R应用.pptVIP

半导体界统计和R的应用 中芯国际 －良率管理系统 2008-12-13 Content Integrated Circuit (IC) Manufacturing Semiconductor Data Flow Statisticians at SMIC R Usage at SMIC 1、线性模型/非线性模型/广义线性模型 Linear model for inline monitor Basic mixed effect model applied to semiconductor data Various correlation analyses 2、统计图形：阐述清楚统计原理与图形元素的对应关系 Useful and interesting plots: histogram w/ splits, plot w/ table (Excel like), wafer map (3-D) 3、非参数统计：各种基于秩的检验以及光滑方法 Smooth spline usage, EWMA Control Chart 5、多元统计：一方面展示已有方法的应用，如主成分、聚类等，另一方面体现出R在矩阵运算方面的简便 Wafer pattern classification: clustering analysis 7、数据挖掘和机器学习: Logistic回归、kNN、以及神经网络、SVM等 Logistic regression application 9、程序接口：C/Fortran/C++/Java等或者R (D)COM、Rserve Python / VB / Delphi / mySQL linking with R R (D)COM under study Climb the Mountain Peak of R, Fighting !!! Linear Model for Inline Monitor WAT Uniformity Analysis (Mixed Effects Model Example) WAT Uniformity Analysis Example Result Other Correlation Analyses Equipment Comparison Interesting Plot 1 Interesting Plot 2 Smooth Spline Usage Split control limit Smooth spline simulates the data for reducing noise EWMA Control Chart The Purpose of EWMA Control Chart: Detect data trend shift ; Reduce SPC X-bar charts excursion false alarm rate. Cluster Analysis Illustrations for Single Wafer Analysis Procedure Interface / Data Preparation Background R Usage at SMIC CD SEM Overlay Macro CD SEM Films Stepper / Track Etch Etcher 5XXX 8XXX ASET-F5 2401 Hitachi Films Dep 2. IC Manufacturing 1. IC Design N-Well P-Well P+ P+ N+ N+ Metal 1 3. Fabricated Wafers WAT FT WS/CP WIP (MES, iEMS) Wafer start Fab out Continually Defect inspection and review: inspection tool KLA,compass) review tool: SEM Leica(OM) Continually ADI, AEI, CD,etc measurement called metrology (MES) MET Defect (KLARF) WIP EQ log data Test data Process data Also reliability, memory bit, QC and other data Reliability Analysis Quality Control Price Time to Market Original Yield Ramp Our