水中感应热发泡式微喷驱动器的研究.pdfVIP

中国科技论文在线 水中感应热发泡式微喷驱动器的研究# 刘本东，侯岳鹏* （北京工业大学机电学院，北京 100124） 5 摘要：基于电磁感应加热方法和热发泡式驱动原理，本文提出一种在水中运动的感应热发泡 式微喷驱动器，该驱动器采用电磁感应加热器件对其腔体内部的水进行加热，使水发生相变， 由液态变为气态，生成气泡，该气泡体积迅速膨胀，瞬间产生压力脉冲，这种压力会使微型 器件发生机械运动。根据微加工的工艺条件，设计了感应热发泡式微喷驱动器的结构和主要 尺寸，设计了一种微喷驱动器的控制系统，搭建了实验平台，进行了微喷驱动器在水中运动 10 的实验，实验表明：在驱动电压为 19V 时，微喷驱动器运行的平均速度最快可达 0.24mm/s。 该驱动方式可以应用到微喷射器、微流控开关和微泵等多种微器件中。 关键词：微喷驱动器；热发泡；感应加热；相变 中图分类号：TM92 15 Research on the thermal-bubble micro actuator with induction heating device Liu Bendong, Hou Yuepeng (Beijing University Of Technology,College of Mechanical Engineering and Applied Electronics Technology, Beijing 100124) 20 Abstract: This paper presents a micro under water actuator which is driven by the thermal bubble generated with electromagnetic induction heating. The water inside the actuator’s chamber is heated by electromagnetic induction heating device. The water changes from liquid to gas, then, vapour bubbles is created in micro actuator chamber. The volume of the bubbles expands rapidly and the pressure in the chamber of the micro actuator will increase. This pressure will make the 25 micro device move. The structure and main dimension of the micro actuator is designed according to the driven theory and fabrication processing technology. The experiment of micro actuator walking in the water was carried on. The experiment shows that the fastest averaged velocity of micro actuator is 0.24mm/s while the driving voltage is 19V. Th