微弧氧化法生成BaTiO3介电薄膜地添加剂研究.pdfVIP

微弧氧化法生成Ba-Ii03介电薄膜的添加剂研究 郭会勇 薛根奇 陈思远 河南平高电气股份有限公司河南平顶山467001 摘 要：在Ba(OH)，溶液中加入添加剂形成不同的电解液，在Ti板上通过微弧氧化工艺制备BaTiO， 薄膜，通过单因素实验得出甘油，纳米TiO：，乙二醇三种添加剂能改善BaTiO，薄膜的表面质量。以 Ba(OH)，、甘油、乙二醇和纳米TiO：为四因素设计L9(43)四因素三水平正交实验，以表面粗糙度和薄膜 生长速率为指标得到了快速制备形貌较好的BaTiO，薄膜的最优溶液体系。物相分析(XRD)、能谱分析 元素组成、表面形貌及薄膜性能。结果表明，最优溶液体系下获得的薄膜主要由四方相BaTiO，构成， 8)值分别为227．3和 薄膜表面质量较好，同时具备较高的介电性能：IOOHz下的介电常数和介质损耗(tan 0．043。 关键词：添加剂；微弧氧化；BaTiO，；介电薄膜 TitanateDielectricF¨m MicroArcOxidation EffectsofAdditivesonBarium By CHEN HuiyongGUO,GenqiXUE，S纱uan Henan Electric 467001，China Pinggao CompanyLimited,Pingdingshan addedIntobarium solution different Abstract：Someadditiveswere hydroxideaqueous forming titanatefilmwere ontitanate Microarc results electrolytes，Bariumdeposited platesby oxidation(MAO)．The were withtheeffectsof nanometerbariumtitanateand indicatedthatthesurfaceofthefilm changed glycerol were for solutionwhichcould glyc01．Orthogonalexperimentsprojecteddainingoptimizationsystem prepare thefilmwithbetter and andHP4284 surfacemorphologyhigherdepositionrate．XRD，EDS，SEMcapacitance wereuesdtocharacterizethe and prober phasescomposition，elementscomposition，surfacemorphology dielectric offilm underthe solution resultsshowthatthefilm propertiesdeposited optimizationsystem．The underthe solution is of bariumtitanate deposited optimizmionsystemcomposedmainlytetragonal phases andfoundto bettersurface filmisalsofoun