用丝网印刷法制备Pt电极及其性能.pdfVIP

22 5 Vol.22 No.5 2 0 0 8 10 CHINESE JOURNAL OF MATERIALS RESEARCH October 2 0 0 8 Pt ∗ ( 430074) Pt , Pt , . , Pt , Pt . Pt 600 , 1200 ( 0.82 µm), ( 0.044 Ω/). , , , , , O646 1005-3093(2008)05-0479-06 Fabrication and sintering of Pt electrode deposited by screen printing ZHANG Haibo∗∗ JIANG Shenglin ZHANG Yangyang ZENG Yike (Department of Electronic Science and Technology, Engineering Research Centre for Functional Ceramics MOE, Huazhong University of Science and Technology, Wuhan 430074) * Supported by National High Technology Research and Development Program of China No.2007AA03Z120, the National Natural Science Foundation of China No Manuscript received January 16, 2008; in revised form June 12, 2008. ** To whom correspondence should be addressed, Tel: (027 E–mail: changhb@ ABSTRACT Double layers Pt bottom electrodes for functional ceramic thick films have been printed on alumina substrates. The effects of sintering temperature, heating rate, and thickness of the Pt layer on the pattern, surface coverage, and the roughness of the electrode layer have been studied. The mechanism of grain and pore growth and densification of the Pt layer is demonstrated. The difference in activation energy and the diffusion is result from the presence of carbon impurities, which influences the diffusion of Pt at low temperatures. As the first layer sintered at 600 , the double Pt layers with sequential heat treatments at 1200 exhibit improved densification and surface coverage. KEY WORDS metallic materials, Pt ele