基于光学与扫描显微平台的微尺度实验力学检测技术与装置研究.pdfVIP

第十一届全国实验力学学术会议 大连 2005 基于光学和扫描显微平台的微尺度实验力 学检测技术和装置研究 李喜德，杨燕，魏成，彭云，张钊 （清华大学工程力学系 FML ，北京 100084 ） 摘要: 本文基于光学和扫描显微平台，介绍了研究组在微尺度实验力学检测技术和设备方面 的最新研究成果。在检测技术方面涉及显微散斑干涉技术、微标记阵列检测技术、晶粒变形 分析技术、光学探针动静态变形分析技术；在检测系统和装置方面介绍了新近开发的双视场 薄膜检测系统、散斑微干涉系统、微标记检测平台、AFM 和 SEM 单轴拉伸装置、三维微 定位与加载系统、微力传感器及其标定装置、微动平台驱动装置等。探讨了微尺度实验力学 检测中的问题和新的检测技术，给出了一些典型的应用和相关装置。 关键词: 微光学干涉；扫描显微镜；变形测量；微尺度对象；动态测试；力学性能。 Measurement of Micro-scale Experimental Mechanics Based * on Stage of Optical and Scanning Microscopes Xide Li, Yan Yang, Cheng Wei, Yun Peng, Zhao Zhang （Department of Engineering Mechanics, FML, Tsinghua University, Beijing, 100084 ） Abstract: The paper gives the overview of various new micro-scale experimental mechanics concepts, methods and devices employing optical and scanning microscopic stages including micro speckle interferometry, micro marker method, optical probe method, grain deformation and movement analysis. In particular, it also describes several devices and measurement systems developed in our group, which are double–field-of-view speckle interferometer for thin film tensile test, microscopic speckle interferometry which enables an alternative usage of conventional specular interferometry (CSI), ESPI, TSIP and phase shifting for microobject shape, in-plane and out-of-plane displacement measurements, micro marker measuring stage for local zone deformation measurement, unaxial tensile setups using in AFM and SEM measuring stages for microobjects and thin films testing and other instruments for microobjects testing, such as positioning and loading system, micro force sensor and programmable